Publication:
Vertical resonant comb actuators for fourier transform spectroscopy

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English

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Abstract

A Fourier Transform Spectrometer is implemented with resonant mode out-of-plane comb actuators which are used as movable diffraction gratings. 106μm deflection is obtained at 28V in ambient pressure at 1.2 KHz for a 3mm clear aperture device.

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IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

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IEEE-Inst Electrical Electronics Engineers Inc

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Engineering, Electrical electronics engineering

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