Publication: Vertical resonant comb actuators for fourier transform spectroscopy
Program
KU-Authors
KU Authors
Co-Authors
Editor & Affiliation
Compiler & Affiliation
Translator
Other Contributor
Date
Language
Embargo Status
N/A
Journal Title
Journal ISSN
Volume Title
Alternative Title
Abstract
A Fourier Transform Spectrometer is implemented with resonant mode out-of-plane comb actuators which are used as movable diffraction gratings. 106μm deflection is obtained at 28V in ambient pressure at 1.2 KHz for a 3mm clear aperture device.
Source
Publisher
IEEE-Inst Electrical Electronics Engineers Inc
Subject
Engineering, Electrical electronics engineering
Citation
Has Part
Source
IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Book Series Title
Edition
DOI
10.1109/omems.2006.1708256
item.page.datauri
Link
Rights
N/A