Publication: Vertical resonant comb actuators for fourier transform spectroscopy
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Abstract
A Fourier Transform Spectrometer is implemented with resonant mode out-of-plane comb actuators which are used as movable diffraction gratings. 106μm deflection is obtained at 28V in ambient pressure at 1.2 KHz for a 3mm clear aperture device.
Source
Publisher
IEEE-Inst Electrical Electronics Engineers Inc
Subject
Engineering, Electrical electronics engineering
Citation
Has Part
Source
IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Book Series Title
Edition
DOI
10.1109/omems.2006.1708256