Publication: 2D scanning MEMS stage integrated with microlens arrays for high-resolution beam steering
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Abstract
A novel MEMS stage using one set of comb fingers, capable of 2-axis motion is designed and developed. With an integrated 1.1mm square microlens-array it deflects 40um in-plane at 60V and 95um out-of-plane at 100V.
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Institute of Electrical and Electronics Engineers
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2009 IEEE Leos International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
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10.1109/OMEMS.2009.5338606
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