Publication: 2D scanning MEMS stage integrated with microlens arrays for high-resolution beam steering
Program
School / College / Institute
College of Engineering
GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
KU Authors
Co-Authors
Publication Date
Language
Embargo Status
Journal Title
Journal ISSN
Volume Title
Alternative Title
Abstract
A novel MEMS stage using one set of comb fingers, capable of 2-axis motion is designed and developed. With an integrated 1.1mm square microlens-array it deflects 40um in-plane at 60V and 95um out-of-plane at 100V.
Source
Publisher
IEEE
Subject
Electrical electronics engineering
Citation
Has Part
Source
2009 IEEE Leos International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Book Series Title
Edition
DOI
10.1109/OMEMS.2009.5338606