Publication: 2D scanning MEMS stage integrated with microlens arrays for high-resolution beam steering
Program
KU Authors
Co-Authors
Advisor
Publication Date
2009
Language
English
Type
Conference proceeding
Journal Title
Journal ISSN
Volume Title
Abstract
A novel MEMS stage using one set of comb fingers, capable of 2-axis motion is designed and developed. With an integrated 1.1mm square microlens-array it deflects 40um in-plane at 60V and 95um out-of-plane at 100V.
Description
Source:
2009 IEEE Leos International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Publisher:
IEEE
Keywords:
Subject
Electrical electronics engineering