Publication: Thermal-mechanical detector array with integrated diffraction grating
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KU Authors
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Unal, G.
Kalyoncu, H.
Kabuli, G.
Caliskan, A. U.
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Abstract
An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures. A diffraction grating is embedded on the pixel membrane for sensing sub-nm mechanical deflections. The first order reflected light was focused on a CCD camera to monitor the entire array. Results show that it is possible to achieve <50mK NETD using a 12 bit CCD camera.
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Publisher
IEEE
Subject
Engineering, Electrical electronic engineering, Nanoscience, Nanotechnology, Optics
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2007 IEEE Leos Annual Meeting Conference Proceedings, Vols 1 and 2
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