Publication: Thermal-mechanical detector array with integrated diffraction grating
Program
KU Authors
Co-Authors
Unal, G.
Kalyoncu, H.
Kabuli, G.
Caliskan, A. U.
Publication Date
Language
Embargo Status
Journal Title
Journal ISSN
Volume Title
Alternative Title
Abstract
An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures. A diffraction grating is embedded on the pixel membrane for sensing sub-nm mechanical deflections. The first order reflected light was focused on a CCD camera to monitor the entire array. Results show that it is possible to achieve <50mK NETD using a 12 bit CCD camera.
Source
Publisher
IEEE
Subject
Engineering, Electrical electronic engineering, Nanoscience, Nanotechnology, Optics
Citation
Has Part
Source
2007 IEEE Leos Annual Meeting Conference Proceedings, Vols 1 and 2