Non-resonant and resonant 2D quasi-static PZT MEMS scanners for LiDAR applications

Abstract

This study presents the design and simulation of four high-performing two-dimensional quasi-static MEMS laser scanners, employing both non-resonant and resonant PZT actuation mechanisms with mechanical coupling. The simulations demonstrate the achievement of optical scanning angles of up to 63.76 degrees for the non-resonant mode and 231.96 degrees for the resonant mode. Additionally, the optical scanning bandwidth-efficiency product (theta(opt).D.f) is calculated as 66.68 deg.mme.Hz for the non-resonant mode and 5741.24 deg.mme.Hz for the resonant mode, establishing these devices as the highest-performing 2D MEMS scanners reported in the literature.