Ürey, HakanTorun, Hamdi2024-11-092005https://hdl.handle.net/20.500.14288/4171xvii, 112 l. : ill. 30 cm.restrictedAccessOptical detectorsDiffraction gratingsInterferometersMicroelectromechanical systemsMicrofabricationDesign and fabrication of thermo-mechanical thermal detector arrays with optical readoutThesis© All Rights Reserved. Accessible to Koç University Affiliated Users Only!