Department of Mechanical EngineeringDepartment of Electrical and Electronics Engineering2024-11-0920071424-4060-809781-4244-0608-110.1109/NANO.2007.46014052-s2.0-52949153623http://dx.doi.org/10.1109/NANO.2007.4601405https://hdl.handle.net/20.500.14288/11579Fabrication of integrated micro and nanoscale components in a single batch is one of the biggest challenges for nanosystems developement. A self-assembly technique that enables "batch-compatible" integration of micro electro mechanical systems with nanoribbons is presented by demonstrating electrostatically actuated combdrive microgrippers with nanoribbon end-effectors. Preliminary fabrication results demonstrate the possibility of obtaining well defined spatial density and orientation of nanoribbons matching the precision of top-down techniques and at the same time allowing complete alignment and registry with subsequent lithography steps.Mechanical engineeringConference proceedinghttps://www.scopus.com/inward/record.uri?eid=2-s2.0-52949153623anddoi=10.1109%2fNANO.2007.4601405andpartnerID=40andmd5=e90cfdf437abab8b11949d6b9d15c9b1261434900278N/A7233