Department of Electrical and Electronics Engineering2024-11-102008978-1-4244-1917-310.1109/OMEMS.2008.46078682-s2.0-54049109712http://dx.doi.org/10.1109/OMEMS.2008.4607868https://hdl.handle.net/20.500.14288/16341An electrostatic large clear-aperture in-plane scanner with a novel actuation principle is presented for fast and large stroke scanning applications. 9 pm resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.EngineeringElectrical electronic engineeringNanoscienceNanotechnologyOpticsConference proceeding264556700071N/A369