Department of Electrical and Electronics Engineering2024-11-0920099781-4244-2382-810.1109/OMEMS.2009.53386062-s2.0-71749104555http://dx.doi.org/10.1109/OMEMS.2009.5338606https://hdl.handle.net/20.500.14288/6127A novel MEMS stage using one set of comb fingers, capable of 2-axis motion is designed and developed. With an integrated 1.1mm square microlens-array it deflects 40um in-plane at 60V and 95um out-of-plane at 100V.Electrical electronics engineeringConference proceedinghttps://www.scopus.com/inward/record.uri?eid=2-s2.0-71749104555anddoi=10.1109%2fOMEMS.2009.5338606andpartnerID=40andmd5=28f04a5fb4e2957df3c47fe17f78c9b6N/A8962