Design and electromechanical modeling of vertically stacked silicon nanowire arrays as coupled resonators

Alaca, Burhanettin ErdemYorulmaz, İsmail2024-11-092012https://hdl.handle.net/20.500.14288/4842x, 59 l : ill ; 30 cm.restrictedAccessMicroelectromechanical systemsNanowiresNanotechnologyResonatorsDesign and electromechanical modeling of vertically stacked silicon nanowire arrays as coupled resonatorsThesis© All Rights Reserved. Accessible to Koç University Affiliated Users Only!