Ürey, HakanSeren, Hüseyin Rahmi2024-11-092009https://hdl.handle.net/20.500.14288/5975xiv, 62 l. : ill. 30 cm.restrictedAccessMicroelectromechanical systemsFourier transform spectroscopyMems fourier transform spectrometer using lamellar gratingThesis© All Rights Reserved. Accessible to Koç University Affiliated Users Only!