Mağden, Emir SalihKoral, Ahmet Kağan2024-11-092022https://hdl.handle.net/20.500.14288/5933xiii, 54 leaves : illustrations, graphics, tables ; 30 cm.restrictedAccessSiliconPhotonicsSilicon, Optical propertiesMicroelectromechanical systemsNanotechnologyThermoelectric materialsThermoelectricityDesign of microheater for thermo-optic tuning of silicon photonic filtersThesis© All Rights Reserved. Accessible to Koç University Affiliated Users Only!