Ürey, HakanBaran, Utku2024-11-092012https://hdl.handle.net/20.500.14288/5925xv, 73 l : ill ; 30 cm.restrictedAccessMicroelectromechanical systems, Design and constructionOptical scannersElectrostatic and piezoelectric MEMS scanner development for laser displaysThesis© All Rights Reserved. Accessible to Koç University Affiliated Users Only!