Ürey, HakanGökçe, Sertan Kutal2024-11-092010https://hdl.handle.net/20.500.14288/4994xv, 86 l. : ill. 30 cm.restrictedAccessMicroelectromechanical systemsScanning systemsHigh resolution imagingImaging systemsElectrostatic mems actuators for endoscopic imaging and high resolution displaysThesis© All Rights Reserved. Accessible to Koç University Affiliated Users Only!