Ürey, HakanAyerden, Nadire Pelin2024-11-092012https://hdl.handle.net/20.500.14288/5884xvii, 104 l. : ill.; 30 cm.restrictedAccessFourier transform infrared spectroscopySpectrometerMicroelectromechanical systemsLamellar grating interferometer based MEMS fourier transform infrared spectrometerThesis© All Rights Reserved. Accessible to Koç University Affiliated Users Only!