Alaca, Burhanettin ErdemNadar, Gökhan2024-11-092022https://hdl.handle.net/20.500.14288/4582xviii, 134 leaves : illustrations ; 30 cm.restrictedAccessNanowiresSiliconTransistorsDetectorsNanostructured materialsNanoelectromechanical systemsNanoelectronicsMicroelectronicsMicroelectromechanical systemsNanotechnologyMEMS compatible highly doped piezoresistive silicon nanowires : fabrication and electromechanical characterizationDissertation© All Rights Reserved. Accessible to Koç University Affiliated Users Only!