2024-11-0920069783-9026-6117-31474-667010.3182/20060912-3-de-2911.000242-s2.0-70449622876https://www.scopus.com/inward/record.uri?eid=2-s2.0-70449622876&doi=10.3182%2f20060912-3-de-2911.00024&partnerID=40&md5=06548a605a05faffae778d3e30efae12https://hdl.handle.net/20.500.14288/12604We present a high-aspect ratio three-beam electro-thermally actuated gripper made from single-crystalline, highly doped silicon, and compare the performance to a five-electrode electrostatic gripper in terms of actuation and manipulation capabilities. The electrothermal gripper can be configured in a number of different ways, which leads to a high degree of adaptability to various manipulation scenarios. Finally, we consider different options for customising the gripper microcantilevers by add-on nanotips.EngineeringConference proceedinghttps://www.scopus.com/inward/record.uri?eid=2-s2.0-70449622876&doi=10.3182%2f20060912-3-de-2911.00024&partnerID=40&md5=06548a605a05faffae778d3e30efae12Q37232