Fabrication of junctionless silicon nanowire transistors via mix and watch pattering based on field emission scanning probe lithography

Alaca, Burhanettin ErdemÖzden, Mert2024-11-092022https://hdl.handle.net/20.500.14288/4524xviii, 66 leaves : illustrations ; 30 cm.restrictedAccessNanowiresSiliconTransistorsNanostructured materialsNanoelectromechanical systemsNanoelectronicsMicroelectronicsMicroelectromechanical systemsNanotechnologyFabrication of junctionless silicon nanowire transistors via mix and watch pattering based on field emission scanning probe lithographyThesis© All Rights Reserved. Accessible to Koç University Affiliated Users Only!