Department of Electrical and Electronics Engineering2024-11-0920121057-715710.1109/JMEMS.2012.22094052-s2.0-84870492593http://dx.doi.org/10.1109/JMEMS.2012.2209405https://hdl.handle.net/20.500.14288/13289A resonant piezoelectric scanner is developed for high-resolution laser-scanning displays. A novel actuation scheme combines the principle of mechanical amplification with lead zirconate titanate (PZT) thin-film actuation. Sinusoidal actuation with 24 V at the mechanical resonance frequency of 40 kHz provides an optical scan angle of 38.5 degrees for the 1.4-mm-wide mirror. This scanner is a significant step toward achieving full-high-definition resolution (1920 x 1080 pixels) in mobile laser projectors without the use of vacuum packaging. The reported piezoscanner requires no bulky components and consumes < 30-mW power at maximum deflection, thus providing significant power and size advantages, compared with reported electromagnetic and electrostatic scanners. Interferometry measurements show that the dynamic deformation is at acceptable levels for a large fraction of the mirror and can be improved further for diffraction-limited performance at full resolution. A design variation with a segmented electrode pair illustrated that reliable angle sensing can be achieved with PZT for closed-loop control of the scanner. [2012-0116]Engineering, electrical and electronicNanoscienceNanotechnologyInstrumentsInstrumentationPhysics, appliedJournal Article1941-0158311854500008Q211512