Ürey, HakanMustafazade, Arif2024-11-092016https://hdl.handle.net/20.500.14288/5002xxii, 200 leaves : illustrations ; 30 cm.restrictedAccessOptical detectorsOptical fiber detectorsOptical MEMSOptoelectronic devices, Design and constructionIntegrated opticsMicroelectromechanical systemsDevelopment of resonance tracking and optical readout methods for MEMS sensor arraysDissertation© All Rights Reserved. Accessible to Koç University Affiliated Users Only!