Department of Electrical and Electronics Engineering2024-11-1020099781-4244-2382-810.1109/OMEMS.2009.53385402-s2.0-71749121057http://dx.doi.org/10.1109/OMEMS.2009.5338540https://hdl.handle.net/20.500.14288/15910A comb-actuated 1D torsional MEMS scanner is developed for high resolution projection display systems using mechanical coupling principle. 64° TOSA (total optical scan angle) is achieved at 22.1 kHz with 170 V peak-to-peak excitation voltages.Electrical electronics engineeringConference proceedinghttps://www.scopus.com/inward/record.uri?eid=2-s2.0-71749121057anddoi=10.1109%2fOMEMS.2009.5338540andpartnerID=40andmd5=31e6990bfdc63c13c9bc1f4b5f49b2f4N/A8961