Department of Electrical and Electronics Engineering2024-11-092007978-1-4244-0924-21092-8081N/A2-s2.0-51249110849https://hdl.handle.net/20.500.14288/15060An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures. A diffraction grating is embedded on the pixel membrane for sensing sub-nm mechanical deflections. The first order reflected light was focused on a CCD camera to monitor the entire array. Results show that it is possible to achieve <50mK NETD using a 12 bit CCD camera.EngineeringElectrical electronic engineeringNanoscienceNanotechnologyOpticsConference proceeding2593452004193023