Department of Electrical and Electronics Engineering2024-11-0920119781-4577-0336-22160-503310.1109/OMEMS.2011.60310642-s2.0-82955239844http://dx.doi.org/10.1109/OMEMS.2011.6031064https://hdl.handle.net/20.500.14288/10514A high-frequency novel torsional MEMS scanner is developed for high resolution microdisplays employing a multi-frame geometry. For the torsional mirror, 26.7° and 36.1° total-optical-scan-angle are achieved at resonance, at atmospheric pressure and vacuum respectively.Electrical electronics engineeringConference proceedinghttps://www.scopus.com/inward/record.uri?eid=2-s2.0-82955239844anddoi=10.1109%2fOMEMS.2011.6031064andpartnerID=40andmd5=d20f92f77506ca4d0c86f888ab5e72cc297850100014N/A8960