2024-11-0920030-7803-7830-X10.1109/OMEMS.2003.12335162-s2.0-65549146418http://dx.doi.org/10.1109/OMEMS.2003.1233516https://hdl.handle.net/20.500.14288/7563A biaxial MEMS raster scanner is developed for laser scanning displays. We discuss microfabrication, packaging, and design aspects, and how to minimize power consumption and linearity error by optimizing the vertical scanner resonant frequency and drive waveform.OpticsConference proceeding185581900078N/A8976