Department of Electrical and Electronics Engineering2024-11-092015978-1-4673-6834-62160-5033N/A2-s2.0-84958559650N/Ahttps://hdl.handle.net/20.500.14288/14622MEMS array oscillators typically require a separate detector and feedback loop for each oscillator. We show that grating-based-optical-readout induces nonlinearity, which enables simultaneous operation of an array-of-oscillators using only one detector and single electronic feedback-loop.EngineeringElectrical and electronic engineeringNanoscienceNanotechnologyOpticsConference proceeding3805130000145257