Alaca, Burhanettin ErdemRoudposhti, Sepeedeh Shahbeigi2024-11-092019https://hdl.handle.net/20.500.14288/620459 leaves : illustrations ; 30 cm.restrictedAccessMicroelectromechanical systemsElectromechanical devicesMicrotechnologyNanowiresMikroelektromekanik sistemlerPolisilisyumPolysiliconNanowire electromechanical switch as a tool for surface characterizationThesis© All Rights Reserved. Accessible to Koç University Affiliated Users Only!