Department of Electrical and Electronics EngineeringDepartment of Chemical and Biological Engineering2024-11-0920109781-4244-8925-110.1109/OMEMS.2010.56722112-s2.0-78751521507http://dx.doi.org/10.1109/OMEMS.2010.5672211https://hdl.handle.net/20.500.14288/14736A biosensor platform is utilized in liquid for detection of His protein. T-shaped thin film nickel cantilevers are actuated magnetically using self-oscillation principle and the sensing is based on embedded diffraction gratings on the cantilevers with interferometric sensitivity. Experiments are performed in a custom 1ml liquid chamber and 5.7ng/ml detection sensitivity is demonstrated. Method is label-free, robust and allows mu ltip lexing. It also doesn't require any electrical connections to the MEMS sensor chip. Therefore, it is suitable for real-time multi analyte screening using a disposable chip in a portable device.Electrical electronics engineeringChemical engineeringBiological engineeringConference proceedinghttps://www.scopus.com/inward/record.uri?eid=2-s2.0-78751521507anddoi=10.1109%2fOMEMS.2010.5672211andpartnerID=40andmd5=13f277616f68d402d6d79b5e4a508d5aN/A8977