Design, fabrication and characterization of a thermo-mechanical infrared detector array with integrated optical readout

Ürey, HakanErarslan, Refik Burak2024-11-092012https://hdl.handle.net/20.500.14288/5255xvii, 110 l : ill ; 30 cm.restrictedAccessMicroelectromechanical systemsInfrared detectorsInfrared imagingDesign, fabrication and characterization of a thermo-mechanical infrared detector array with integrated optical readoutThesis© All Rights Reserved. Accessible to Koç University Affiliated Users Only!