Department of Electrical and Electronics Engineering2024-11-0920119781-4577-0336-22160-503310.1109/OMEMS.2011.60310532-s2.0-82955193736http://dx.doi.org/10.1109/OMEMS.2011.6031053https://hdl.handle.net/20.500.14288/11705A comb-actuated rotary MEMS stage with a novel spring structure to achieve linear spring stiffness is presented. The present stages can at resonance rotate ±7deg. and ±4.5deg at vacuum and ambient pressure, respectively.Electrical electronics engineeringConference proceedinghttps://www.scopus.com/inward/record.uri?eid=2-s2.0-82955193736&doi=10.1109%2fOMEMS.2011.6031053&partnerID=40&md5=8a5fec84f42166f542c7b541cc74e01f297850100015N/A8963