Scale dependency of heat transfer modes, fabrication of si nanowires and their integration with MEMS

Alaca, Burhanettin ErdemÖzsun, Özgür2024-11-092008https://hdl.handle.net/20.500.14288/5132xviii, 110 l. : ill 30 cm.restrictedAccessHeat, TransmissionMicroelectromechanical systemsScale dependency of heat transfer modes, fabrication of si nanowires and their integration with MEMSThesis© All Rights Reserved. Accessible to Koç University Affiliated Users Only!