Ürey, HakanAdiyan, Ulaş2024-11-092016https://hdl.handle.net/20.500.14288/4319xxv, 182 leaves : illustrations ; 30 cm.restrictedAccessOptical MEMSIntegrated opticsOptoelectronic devicesAC-coupled optical readoutMEMS cantilever sensor arraysThermo-mechanical IR detectorsBimaterial cantileversDiffraction gratingOptical readout methods for mems cantilever based sensorsDissertation© All Rights Reserved. Accessible to Koç University Affiliated Users Only!