Başdoğan, ÇağatayAytekin, Arda2024-11-092013https://hdl.handle.net/20.500.14288/5228x, 36 l. : ill. 30 cm.restrictedAccessAtomic force microscopyScanning systemsSystem identificationGenetic algorithmsA combined LQG and repetitive controller for high performance AFM scanningThesis© All Rights Reserved. Accessible to Koç University Affiliated Users Only!