Department of Electrical and Electronics Engineering2024-11-0920121057-715710.1109/JMEMS.2011.21825042-s2.0-84863396037http://dx.doi.org/10.1109/JMEMS.2011.2182504https://hdl.handle.net/20.500.14288/7224A novel bending flexure spring design is presented, providing linear stiffness for large rotations of a suspended body. Over 98% linear motion for up to +/- 7 degrees mechanical scan angle is achievable with the new suspension design. [2011-0292]EngineeringElectrical electronic engineeringNanoscienceNanotechnologyInstrumentsInstrumentationPhysicsApplied physicsJournal Article304904400003745