Department of Electrical and Electronics Engineering2024-11-092008978-1-4244-1983-810.1109/RME.2008.45957352-s2.0-51849121067http://dx.doi.org/10.1109/RME.2008.4595735https://hdl.handle.net/20.500.14288/13410A novel thermo-mechanical Infrared (IR) imaging array with integrated diffraction gratings for optical readout was fabricated and tested. Parylene was used as a structural material for its low thermal conductivity and high thermal expansion properties. Tests were performed using an IR blackbody target and first order diffracted light was imaged on a CCD camera to monitor the entire array. Results show that it is possible to achieve <100mK NETD using a 12 bit CCD camera.Computer scienceComputer architectureCivil engineeringElectrical electronics engineeringTelecommunicationConference proceeding2591170000268528