Alaca, Burhanettin ErdemYavuz, Serhat2024-11-092010https://hdl.handle.net/20.500.14288/4931xviii, 122 l. : ill. ; 30 cm.restrictedAccessResonatorsMetallic micro-cantilever resonators: Fabrication and mechanical property measurementsThesis© All Rights Reserved. Accessible to Koç University Affiliated Users Only!