Department of Electrical and Electronics Engineering2024-11-0920090924-424710.1016/j.sna.2009.02.0142-s2.0-71649093905http://dx.doi.org/10.1016/j.sna.2009.02.014https://hdl.handle.net/20.500.14288/15363A simple optical setup combining interferometric and knife-edge methods is proposed for deflection measurements and sensing both out-of-plane and in-plane movements of M EMS and NEMS devices. The setup has 100 pm/root Hz in-plane measurement resolution for I mu m full-width-half-maximum spot size illumination and 4 pm/root Hz out-of-plane resolution. The sensor offers large dynamic range. Sensor setup can also be used to measure and differentiate combined modes in some cases.Electrical electronics engineeringPhysical instrumentsConference proceeding2726361000327581