Başdoğan, İpekAnaç, Ozan2024-11-092006https://hdl.handle.net/20.500.14288/5492xii, 72 l. : ill. 30 cm.restrictedAccessMicroelectromechanical systemsElectromechanical devicesMicrotechnologyBioMEMSModel validation and performance analyses for MEMS designThesis© All Rights Reserved. Accessible to Koç University Affiliated Users Only!