Department of Mechanical Engineering2024-11-0920151546-195510.1166/jctn.2015.43742-s2.0-84964944571http://dx.doi.org/10.1166/jctn.2015.4374https://hdl.handle.net/20.500.14288/6802Resonance frequencies and quality factors of micro/nano electromechanical resonators are known to differ significantly from target values in the presence of intrinsic stresses. This stress effect is modeled for a two-port system with electrostatic actuation and capacitive read-out. A methodology is proposed to compute equivalent electrical parameters for a double-clamped beam resonator under stress. The model is verified with finite element analysis, and a number of case studies are conducted in addition. Increase in resonance frequency with increasing intrinsic tensile stress is observed under mechanical and electrical effects, while a deterioration of quality factor is evident in cases with pronounced parasitic effects. Related challenges associated with the transition to the nanoscale are computationally captured. Finally, a short formulation is provided with relevant error margins for the direct estimation of equivalent circuit parameters. The proposed approach serves as a useful tool for layout design, where all involved dimensions are considered in addition to operational variables such as bias voltage and unloaded quality factor.Mechanical engineeringJournal Articlehttps://www.scopus.com/inward/record.uri?eid=2-s2.0-84964944571anddoi=10.1166%2fjctn.2015.4374andpartnerID=40andmd5=5597437514ef3cfeedf998b490fc5f4dQ29676