Department of Mechanical EngineeringDepartment of Electrical and Electronics Engineering2024-11-0920070957-448410.1088/0957-4484/18/37/3755012-s2.0-34548146068http://dx.doi.org/10.1088/0957-4484/18/37/375501https://hdl.handle.net/20.500.14288/13979A batch- compatible integration of micro- electro- mechanical systems ( MEMS) with nanoscale objects is demonstrated using the example of a gripping device with nanoscale end- effectors. The proposed nanofabrication technique is based on creating a certain number of nanowires/ ribbons on a planar surface, each with a known orientation, using self- assembled crack networks as a template. Since both the location and orientation of the nanowires/ ribbons are known, the gripping device can be lithographically transferred on to the substrate ensuring full integration of MEMS with nanoscale end- effectors. Two nanowires/ ribbons are attached to each MEMS solely at desired locations with a desired inclination in contrast to most other self- assembly- based techniques of growing nanoscale objects. Challenges unique to MEMS fabrication are encountered raising process requirements beyond those of the simple electrode - nanowire integration. With issues related to yield and end- effector geometry remaining to be studied further, the method proposes a true batch fabrication for nanoscale objects and their integration with MEMS, which does not require the use of nano- lithographic techniques.NanoscienceNanotechnologyMaterials sciencePhysicsApplied physicsJournal Article249282900005142