Department of Electrical and Electronics Engineering2024-11-0920091876-619610.1016/j.proche.2009.07.3292-s2.0-71549140937https://hdl.handle.net/20.500.14288/1843A novel micromechanical stage with a uniaxial set of combfingers capable of 2D actuation is designed and developed. Driven at resonance the stage deflects up to 108 mu m out-of-plane and 102 mu m in-plane, with 140V and 94V peak-to-peak actuation voltage, respectively.pdfChemistryNanoscience and nanotechnologyConference proceedinghttps://doi.org/10.1016/j.proche.2009.07.329275995600112N/ANOIR00836