Başdoğan, ÇağatayCebeci, Selman A.2024-11-092011https://hdl.handle.net/20.500.14288/6379viii, 45 l. : ill. ; 30 cm.restrictedAccessScanning systemsOptical scannersRepetitive control of an XYZ piezo-stage for faster nano-scanning numerical simulations and experimentsThesis© All Rights Reserved. Accessible to Koç University Affiliated Users Only!