Department of Electrical and Electronics EngineeringDepartment of Chemical and Biological EngineeringDepartment of Mechanical Engineering2024-11-0920081041-113510.1109/LPT.2008.20052532-s2.0-57049106308http://dx.doi.org/10.1109/LPT.2008.2005253https://hdl.handle.net/20.500.14288/11430Nickel cantilevers with integrated diffraction gratings are used as resonant mass sensors with a resolution of 500 femtograms. Their applicability to biosensing is demonstrated with human opioid receptors. The device is fabricated through a single-mask lithographic process. The microoptical readout provides a simple measurement platform with one external photodiode. Thanks to its ac operation principle, the device is immune to environmental noise and entails a high tolerance to fabrication defects. Obtained signal-to-noise ratio is comparable to that of a high-end Doppler vibrometer. The device with these aspects for systems integration and microarray technology is a candidate for low-cost portable sensors.EngineeringElectrical and electronic engineeringOpticsPhysicsApplied physicsJournal Article1941-017426184780005010042