Ürey, HakanAtaman, Çağlar2024-11-092008https://hdl.handle.net/20.500.14288/5867xxvii, 192 l. : ill 30 cm.restrictedAccessScanning systemsMicroelectromechanical systemsSpectrum analysisMems scanners for spectroscopy and laser scanning systemsDissertation© All Rights Reserved. Accessible to Koç University Affiliated Users Only!