Department of Electrical and Electronics Engineering2024-11-0920071041-113510.1109/LPT.2007.9084502-s2.0-38049125816http://dx.doi.org/10.1109/LPT.2007.908450https://hdl.handle.net/20.500.14288/12558Diffraction gratings integrated with micro-electro-mechanical-systems (MEMS) offer shot noise limited subnanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. a two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. the two-laser illumination extended the detection range from 105 nm to 1.7 mu m assuming the readout sensitivity is maintained at >50% of the maximum sensitivity.EngineeringElectrical electronic engineeringOpticsPhysics, Applied physicsJournal Article1941-0174251701000065Q33022