Department of Mechanical Engineering2024-12-2920240169-433210.1016/j.apsusc.2024.1600382-s2.0-85189941703https://doi.org/10.1016/j.apsusc.2024.160038https://hdl.handle.net/20.500.14288/23642This paper presents the experimental findings on the effect of deposition conditions on the microstructure of the corrosion-resistant TiTaNbZrMo high entropy alloy (HEA) thin films deposited on NiTi substrates with the purpose of enhancing biocompatibility of the NiTi shape memory alloy (SMA). For this purpose, RF magnetron sputtering was employed to fabricate TiTaNbZrMo HEA films with 750 nm and 1500 nm thicknesses. Static immersion experiments were conducted in simulated body fluid (SBF) and artificial saliva (AS) solutions for 1, 14, and 28 days to establish the relationship between Ni ion release and deposition parameters. The results revealed that thin films grown under low working pressure exhibited crystalline body-centered cubic (BCC) microstructure with a highly dense, compact, and crack-free structure, while those deposited under high-pressure conditions exhibited an amorphous structure with inherent cracks. The biocorrosion test results indicated that the dense and compact thin film fulfilled the expected corrosion resistance requirements for prolonged utility in human body. Moreover, the HEA films revealed an outstanding amount of hydroxyapatite (HAp) formation, indicating remarkable bioactivity and favorable bone-bonding capabilities. The findings suggest that the HEA films deposited under low working pressures could constitute promising alternatives to conventional coatings on NiTi SMAs.Mechanical EngineeringJournal article1873-55841227968300001Q141785