Alaca, Burhanettin ErdemÖztürk, Alibey2024-11-092008https://hdl.handle.net/20.500.14288/4304xiii, 67 l. : ill 30 cm.restrictedAccessDiffraction gratingsMicroelectromechanical systemsNanoelectromechanical systemsDevelopment of a diffraction-gratic-based micro-gravimetric sensing method for biological applicationsThesis© All Rights Reserved. Accessible to Koç University Affiliated Users Only!