2024-11-0920129781-4577-1511-22160-503310.1109/OMEMS.2012.63188372-s2.0-84869200565http://dx.doi.org/10.1109/OMEMS.2012.6318837https://hdl.handle.net/20.500.14288/14134MEMS LGI FTIR system is developed and optimized. Out-of-plane deflection >500μm is obtained at 350Hz using piezoelectric and acoustic actuation. Optical system is optimized to obtain the best spectrum. 20μm SOI film thickness is measured.Electrical electronics engineeringConference proceedinghttps://www.scopus.com/inward/record.uri?eid=2-s2.0-84869200565anddoi=10.1109%2fOMEMS.2012.6318837andpartnerID=40andmd5=17f8033ae16982c034b3245fc8563770309942400061N/A8953