Department of Electrical and Electronics Engineering2024-11-092007978-1-4244-0641-810.1109/OMEMS.2007.43738572-s2.0-48049107498http://dx.doi.org/10.1109/OMEMS.2007.4373857https://hdl.handle.net/20.500.14288/7498Diffraction gratings integrated with MEMS has many applications as they can offer shot noise limited sub-nm displacement detection sensitivities but are limited in range. a two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range from 105nm to 1.7um assuming sensitivity is maintained at > 50% of the maximum sensitivity.Electrical electronics engineeringNanoscienceNanotechnologyOpticsSpectrum analysisConference proceeding251224200048N/A8526