Ürey, HakanArslan, Aslıhan2024-11-092008https://hdl.handle.net/20.500.14288/5749xx, 113 l. : ill 30 cm.restrictedAccessScanning systemsOptical scannersMems scanners actuated with mechanical coupling and comb drivesThesis© All Rights Reserved. Accessible to Koç University Affiliated Users Only!