Başdoğan, İpekVeryeri, Ilgar2024-11-092009https://hdl.handle.net/20.500.14288/5073x, 67 l. : ill. 30 cm.restrictedAccessMicroelectromechanical systemsElectromechanical devicesDynamic characterization and modification of the modal properties of MEMS structuresThesis© All Rights Reserved. Accessible to Koç University Affiliated Users Only!