Department of Electrical and Electronics Engineering2024-11-0920060-8194-6242-X0277-786X10.1117/12.6647812-s2.0-33746663604https://hdl.handle.net/20.500.14288/1028Design, fabrication and characterization of a novel out-of-plane vertical comb-drive actuator based Fourier transform microspectrometer (FTS) is presented. The spectrometer utilizes resonant mode vertical comb actuators as a variable-depth diffraction grating and a single photodetector to monitor the 0th order of the diffraction pattern. The spectrum of the source illuminating the gratings is computed by Fourier transforming the 0th order intensity as a function of the optical path difference. The vertical comb actuators have a travel range of 100 mu m under atmospheric pressure with 28V excitation, which yields a theoretical spectral resolution of 0.5nm in the visible and better than 5nm in the telecom wavelengths.pdfOpticsInstruments and instrumentationConference proceedinghttps://doi.org/10.1117/12.664781238881100017N/ANOIR00525